RT Monograph SR 00 A1 Appleyard, M.M. A1 Hatch, N.W. A1 Mowery, D.C. T1 Managing the Development and Transfer of Process Technologies in the Semiconductor Manufacturing Industry YR 1996 FD 1996-04 SP 53 PB WP-96-043 PP IIASA, Laxenburg, Austria AV Published LK https://pure.iiasa.ac.at/id/eprint/4983/